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Chemical mechanical polishing machine ISMP-1300-4
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China
Main Products:
Vacuum Hot Press
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Product information

Technical parameter standards:

Working size: Max.Dia 400mm *4

Pressure: Max.400kg/1ea *4

Turntable size: 1300mm

Turntable speed: Max60rpm, motor: 22kw*1/30

Ocilation system: Max.30rp (stroke30-80mm), motor: 5.5kw*1/60

Rolling line: 1100mmm

Pressure control: Multi-level control (20 steps)

Electrical control: PLC control (HME system)

Function introduction:

Four-head synchronous operation

- Increase productivity

Multi-level pressure control

-20 level adjustable

Ocilation system

- Stroke 30-80mm

Turntable cooling system

- Adjustable cooling temperature

Automatic pulp supply system

Equipment applications:

This series of equipment is mainly used for high-precision double-sided grinding and polishing of hard and brittle materials such as semiconductors, sapphire, optical glass, ceramics, metals, and quartz

Equipment characteristics:

The theme of the equipment body is cast satin for good stability

Precision components are selected from well-known imported brands to ensure efficient and stable grinding and polishing quality and equipment life.

Human-friendly operation interface, convenient parameter setting and process mode conversion

Multi-specification and multi-power models can be customized according to customer needs

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