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Automatic optical inspection machine
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Price:
price negotiable
Brand Name:
CMItCountry Region:
Taiwan, ChinaModel No:
Buffalo S3002
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CMIt 
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Country: Taiwan, China
Main Products: Automatic optical inspection machine
View more
Price:
price negotiable
Brand Name:
CMItCountry Region:
Taiwan, ChinaModel No:
Buffalo S3002

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CMIt 
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Taiwan, China
Main Products:
Automatic optical inspection machine

Product information
应用
8、12吋 Wafer
晶圆进料检验(入料) IQC、成品出厂检验OQC
- 2.5D/3D IC
- Fan-out Wafer Level Packaging (FOWLP)
- Fan-out Panel Level Packaging (FOPLP)
最小检出缺陷尺寸
1µm
功能特色
- 高精度转塔检测系统
- 多光源配置设计(BF/DF)
- 快速精准对焦系统(Auto Focus System),实现影像质量最佳化,可支援复杂设计之multi layer wafer
- 超级大die功能(one chip on full 12" Wafer)
- 多功能2D量测系统,可量测各式关键尺寸(Critical Dimension) 如:RDL CD, Pad open CD, Bump Diameter…
- CAD Import Function便捷设计,可大幅节省Recipe建立时间
- 边缘检测功能(EBR Function),可支援多种晶圆产品(Wafer/方片)(Option)
选配
- Color Filter
- 高翘曲(high warpage)晶圆解决方案,最高可支援±7mm(Option)
- 多芯片模块晶圆应用Multi Die Function
- OCR SEMI标准字符识别,识别率>99%
- 手持式 Barcode Reader/ RFID 功能
- 特殊Al学习,分规准确率>90%
- JDView离线复判软件,可提供Map叠图分析
- Recipe 离线编辑功能
- Recipe 共享功能 (Recipe Server)
- SEMI S2/S8 认证
- SECS/GEM 通讯系统
- 可支援自动化传送系统(OHT/AGV/MGV...)
关键缺陷
- RDL Damage
- Pad Open
- Short
- Residue
- Particle
- Scratch
关键量测
- RDL CD
- Pad Open CD
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Automatic optical inspection machine
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