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Product information
Features
01—Reduce the use of pilot wafer—
With accurate feedback, the output value can come close to the target value within the shortest time so the use of pilot wafer can be reduced significantly.
02—Improve Product Cpk—
APC can effectively control the product around the target value, ensuring the product quality
03—Reduce the Incidence of OOS—
Taking all the possible factors into full account in the algorithm, the occurrence of outliner can be effectively reduced.
04—Reduce the Incidence of MO—
Through integral system operation, the chances of personnel operation required can be reduced substantially, coupled with the guard control of the compensation value in the system, the occurrence of MO will be reduced.
Advantage Effect
Virtual Measurement
Equipment Health Monitoring
Image Defect Diagnosis
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