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Global Trading Service Platform for Machinery

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+86 25-84532303
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sunyuchen@sumec.com.cn
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Magnetron sputter coater
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JAVAC
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JAVAC
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China
Main Products:
Coating machine
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Product information

● Vacuum chamber: SUS304, Ø1100mm x 780mm(H)

● Workpiece disc size: 152mm(W)×6mm(T)×555mm(H)×20 pieces

● Workpiece rotation speed: 0rpm ~ 60rpm (magnetic fluid seal)

● Optical film thickness monitoring: wavelength range 400nm ~2400nm

● Direct monitoring (optional) : in-situ(option)

● Crystal film thickness meter: two-point crystal probe + crystal film controller

● Arrival pressure: ≦6.0X10-5Pa

● Vacuum recovery: 1.3X10Pa within 30 minutes

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