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+86 25-84532303
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sunyuchen@sumec.com.cn
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Optical film coating machine
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JAVAC
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JAVAC
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China
Main Products:
Coating machine
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Product information

● Vacuum chamber: SUS304, Ø1550mm x 1550mm(H)

● Workpiece disc size: Ø1450mm

● Workpiece rotation speed: 0rpm ~ 60rpm adjustable

● Optical film thickness monitoring: wavelength range 400nm ~ 2400nm

● Ion source: multi-choice, hall source, PDS, RF RF source optional

● Exhaust system: mechanical pump + Roots pump + cold pump

● Crystal film thickness meter: XTC/3+ six-point rotary crystal probe

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