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SIC epitaxial furnace
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Guangzhou YS Semiconductor Equipment Co., Ltd.
Guangzhou YS Semiconductor Equipment Co., Ltd. icon
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Guangzhou YS Semiconductor Equipment Co., Ltd.
Guangzhou YS Semiconductor Equipment Co., Ltd. icon
China
Main Products:
Silicon carbide epitaxy equipment, silicon carbide crystal growth equipment
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Product information

Equipment Name: Silicon Carbide epitaxy furnace equipment model: YS-E06S01 equipment functions: silicon carbide substrate grown by CVD method size: 4-inch compatible 6-inch, 6-inch compatible 8-inch in-chip thickness heterogeneity: < 2% in-chip doping concentration heterogeneity: < 5% morphology defect density: < 1/CM2 equipment features: 1, with N, P-type and high-rate epitaxy growth capacity; 2、 high uniformity and low defect SIC Epitaxy Quality 3、 RUN TO RUN excellent performance 4、 Integrated Liquid Supply System.

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