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Laser Debonding
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Price:
price negotiable
Brand Name:
LasTop TechnologyCountry Region:
ChinaModel No:
LD
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Country: China
Main Products: Wafer laser annealing, wafer laser marking, wafer laser debonding, wafer laser slotting, wafer laser slicing, wafer level laser marking, fully automatic laser glue removal, IC fully automatic laser marking, frame laser marking, and three light spot inspection
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Price:
price negotiable
Brand Name:
LasTop TechnologyCountry Region:
ChinaModel No:
LD
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LasTop Technology 
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China
Main Products:
Wafer laser annealing, wafer laser marking, wafer laser debonding, wafer laser slotting, wafer laser slicing, wafer level laser marking, fully automatic laser glue removal, IC fully automatic laser marking, frame laser marking, and three light spot inspection
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Product information
Laser Debonding | LD
Application
Debonding of temporary bonded
wafer by laser, followed by
separating, and cleaning, for
carrier substrate re-use and
ultra-thin wafer subsequent
processing
Product Features
Laser debonding, stripping and cleaning functions
Square top hat beam, benefits high debonding efficiency and low thermal damage
Real-time monitoring and automatic compensation, ensuring process stability
Providing wavelength- matching bonding adhesive
Technical specification | |
Laser wavelength | 355nm/1340nm |
Wafer size | 6 inch, 8 inch, 12 inch |
Laser power | 15/30W@355nm, 100W@1340nm |
Focused spot size | X:0.2mm~1.0mm, Y:0.2mm~1.0mm |
Laser energy density | 0.05-1J/cm2 |
Typical Laser Scan Time | 100 sec@12 inch |
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