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+86 25-84532303
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sunyuchen@sumec.com.cn
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Laser Debonding
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LasTop Technology
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LasTop Technology
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China
Main Products:
Wafer laser annealing, wafer laser marking, wafer laser debonding, wafer laser slotting, wafer laser slicing, wafer level laser marking, fully automatic laser glue removal, IC fully automatic laser marking, frame laser marking, and three light spot inspection
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Product information

Laser Debonding | LD

Application

Debonding of temporary bonded
wafer by laser, followed by
separating, and cleaning, for
carrier substrate re-use and
ultra-thin wafer subsequent
processing

Product Features

Laser debonding, stripping and cleaning functions

Square top hat beam, benefits high debonding efficiency and low thermal damage

Real-time monitoring and  automatic compensation, ensuring process stability

Providing wavelength- matching bonding adhesive

Technical specification 
Laser wavelength355nm/1340nm
Wafer size6 inch,  8 inch, 12 inch
Laser power15/30W@355nm, 100W@1340nm
Focused spot sizeX:0.2mm~1.0mm, Y:0.2mm~1.0mm
Laser energy density0.05-1J/cm2
Typical Laser Scan Time100 sec@12 inch
All products in the store
Strip Laser MarkingAll products in the store
IC framework Laser MarkingAll products in the store
Laser DebondingAll products in the store
Wafer Laser Marking All products in the store
Laser DecappingAll products in the store
Fiber Laser High Speed MarkingAll products in the store