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Ultra-shallow dopant laser annealing
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Price:
price negotiable
Brand Name:
LasTop TechnologyCountry Region:
ChinaModel No:
LA
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Country: China
Main Products: Wafer laser annealing, wafer laser marking, wafer laser debonding, wafer laser slotting, wafer laser slicing, wafer level laser marking, fully automatic laser glue removal, IC fully automatic laser marking, frame laser marking, and three light spot inspection
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Price:
price negotiable
Brand Name:
LasTop TechnologyCountry Region:
ChinaModel No:
LA
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LasTop Technology 
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China
Main Products:
Wafer laser annealing, wafer laser marking, wafer laser debonding, wafer laser slotting, wafer laser slicing, wafer level laser marking, fully automatic laser glue removal, IC fully automatic laser marking, frame laser marking, and three light spot inspection
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Product information
Ultra-shallow dopant laser annealing | LA
Application
Ultra-shallow dopant laser
annealing for BSI-CCD wafer
Product Features
The first in China, 8 inch mass production equipment
Precise energy density control
UV laser with low penetration depth
1D top hat beam with large lengh/width ratio
Low dopant diffusion
Technical specification | |
Wafer Size | 6 inch, 8 inch |
Junction depth | ≤50nm |
Impurity peak diffusion depth | ≤5nm |
RS non-uniformity | <2% (WIW/WTW) |
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