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IGBT Laser Annealing
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Price:
price negotiable
Brand Name:
LasTop TechnologyCountry Region:
ChinaModel No:
LA
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Country: China
Main Products: Wafer laser annealing, wafer laser marking, wafer laser debonding, wafer laser slotting, wafer laser slicing, wafer level laser marking, fully automatic laser glue removal, IC fully automatic laser marking, frame laser marking, and three light spot inspection
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Price:
price negotiable
Brand Name:
LasTop TechnologyCountry Region:
ChinaModel No:
LA
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LasTop Technology 
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China
Main Products:
Wafer laser annealing, wafer laser marking, wafer laser debonding, wafer laser slotting, wafer laser slicing, wafer level laser marking, fully automatic laser glue removal, IC fully automatic laser marking, frame laser marking, and three light spot inspection
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Product information
IGBT Laser Annealing | LA
Application
Ion-activation for silicon IGBT
Product Features
High reliability and stability
Independly developped Optical system
Excellent thermal budget control
50μm ultra-thin TaiKo wafer handling capability
Technical specification | ||||
Wafer size | 6 inch, 8 inch, 12 inch | |||
Laser power | 60W*2 | 90W*2 | 60W*2+300W | 90W*2+300W |
Laser energy density | ≥5J/cm2×2 | |||
Activation efficiency | ≥95%@B+ | ≥90%@P+ | ||
RS non-uniformity | WIW:≤1%@3sigma | WTW:≤1%@3sigma |
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