Sumec menuSumec menu

SUMEC TOUCH WORLD

Global Trading Service Platform for Machinery

search Search
Image
中文
Image
+86 25-84532303
Image
sunyuchen@sumec.com.cn
1 / 1
Coater/Developer-F
iconicon
Post RequirementsPost Requirements
TDSEMI
TDSEMI icon
View more
Post RequirementsPost Requirements
TDSEMI
TDSEMI icon
China
Main Products:
22-90 nano process coating gel developer, single piece wet cleaning machine, gel stripping machine, single piece etching machine, Spray machine, etc
icon

Product information

Applicable field front channel 90nm process, wafer level packaging
High yield model, 8spin, standard configuration 3 Cot & 5 Dev
Suitable for scale production and can be used with a lithography machine inline
Wafer processing size 8 inch or 12 inch products
Matching multiple lithography processes KrF, i-line
Equipment includes EFEM, Cot & Dev, Owen, Interface
Modular, flexible configuration
Modular unit for easy maintenance (quick repair & quick change)
Graphical human-computer interaction interface
High yield 300-320 WPH, standard glue process

All products in the store
Gluing and developing machineAll products in the store
Single Wafer-WetClean/Liftoff/WetEtchAll products in the store
Spray CoaterAll products in the store
Clean-pro2000All products in the store
Coater/Developer-CAll products in the store
Coater/Developer-FAll products in the store