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high resolution field emission sem high resolution field emission sem high resolution field emission sem Ultra-high Resolution FESEM | SEM5000X
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Main Products:
Scanning Electron Microscope
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Product information

Ultra-high resolution Field Emission Scanning Electron Microscopy (FE-SEM) with breakthrough resolution of 0.6 nm@15 kV and 1.0 nm@1 kV.

Benefiting from the upgraded column engineering process, “SuperTunnel” technology, and high-resolution objective lens design, SEM5000X can achieve further improvements in low-voltage imaging resolution. The specimen chamber ports extend to 16, and the specimen exchange load-lock supports up to 8-inch wafer size (maximum diameter 208 mm), greatly expanding applications' coverage. The advanced scanning modes and enhanced automated functions bring stronger performance and an even more optimized experience.

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