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Global Trading Service Platform for Machinery

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中文
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+86 25-84532303
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sunyuchen@sumec.com.cn
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Single Wafer Wet Etching / Cleaning Tool
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China
Main Products:
4 - to 12-inch slot and single wafer etching cleaning wet process equipment
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Product information

Application(应用)
Metal Etching, DSP+
Liquid Film PR Stripper
Backside Etching
Thin Wafer Etching with Bernoulli Chuck

Performance(工艺)
PA adder, 0.2um <10ea
u% <3% of metal etching
SECS GEM, RMS, iEMS, FDC
Scheduler

Advantage(竞争优势) 
>97% Chemical Recycle Rate
Max 4 chemicals in one chamber
Modularized Platform for 200/300mm Wafer

Safety(安全)
Semi S2/S6/F47 Certification
FM approval material and CO2 fire extinguisher
Interlock Matrix Control
 

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