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Single Wafer Wet Etching / Cleaning Tool


Price:
price negotiable
Brand Name:
tronwayCountry Region:
ChinaModel No:
CS+150/ CS+200/ CS+300


tronway 

Country: China
Main Products: 4 - to 12-inch slot and single wafer etching cleaning wet process equipment
View more
Price:
price negotiable
Brand Name:
tronwayCountry Region:
ChinaModel No:
CS+150/ CS+200/ CS+300


tronway 

China
Main Products:
4 - to 12-inch slot and single wafer etching cleaning wet process equipment

Product information
Application
Metal Etching, DSP+
Liquid Film PR Stripper
Backside Etching
Thin Wafer Etching with Bernoulli Chuck
Performance
PA adder, 0.2um <10ea
u% <3% of metal etching
SECS GEM, RMS, iEMS, FDC
Scheduler
Advantage
>97% Chemical Recycle Rate
Max 4 chemicals in one chamber
Modularized Platform for 200/300mm Wafer
Safety
Semi S2/S6/F47 Certification
FM approval material and CO2 fire extinguisher
Interlock Matrix Control
All products in the store
Etching / Cleaning Wet Bench

Single Wafer Wet Etching / Cleaning Tool


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