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Global Trading Service Platform for Machinery

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中文
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+86 25-84532303
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sunyuchen@sumec.com.cn
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Etching / Cleaning Wet Bench
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China
Main Products:
4 - to 12-inch slot and single wafer etching cleaning wet process equipment
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Product information

Application(应用)
PR stripper、Nit Stripper
Pre Clean、B-Clean
Metal Removal
Post Ash Polymer Removal

Performance(工艺优势)
PA adder, 0.16um <10ea
u% <3% of oxide etching
SECS GEM, RMS, iEMS, FDC
Scheduler

Advantage(竞争优势) 
Localized Software Team
Tech for 100~300mm(90nm) process  
Owned Tech of Cassette and Cassette-less Bench

Safety(安全)
Semi S2/S6/F47 Certification
FM approval material and CO2 fire extinguisher
Interlock Matrix Control

All products in the store
Etching / Cleaning Wet BenchAll products in the store
Single Wafer Wet Etching / Cleaning ToolAll products in the store