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Double chamber automatic 6-8 "compatible fast annealing furnace
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LarcomSE
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LarcomSE
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China
Main Products:
RTP/RTA
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Product information

Integrated circuit automatic 8-inch fast annealing furnace RTP
For 6-8 inch wafers, fully automatic production line
Equipment specifications:

1. Automatic operation mode, configure Loadport;
2.Rob cotton t take and place:
3. Applied to 6-8 inch wafers;
4. Cooling methods include water cooling and ammonia purge.

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