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sunyuchen@sumec.com.cn
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Organic evaporation coating machine
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SYSKEY
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SYSKEY
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Taiwan, China
Main Products:
Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD
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Product information

By utilizing crucibles with excellent insulation effects to achieve stable evaporation of organic materials, and utilizing ultra high precision quartz crystal oscillators to achieve the most precise control of evaporation rate, Siqi Technology can provide high-performance organic evaporation coating machines, mainly used for organic material verification, OELD device coating machines, OPV device coating machines, organic CMOS coating machines, etc.


Technical parameters:
1. Background vacuum of 10-7 Torr;
2. Electrode evaporation beam source furnace, metal crucible, metal electrode evaporation boat, etc;
3. IC6 optical coating grade quartz crystal oscillator measurement film thickness;
4. Connect to glove box
5. Mask alignment function, mechanical alignment or CCD alignment

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