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中文
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+86 25-84532303
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sunyuchen@sumec.com.cn
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Thermal evaporation coating machine
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SYSKEY
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SYSKEY
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Taiwan, China
Main Products:
Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD
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Product information

The process of placing the substrate or workpiece to be coated in a vacuum chamber, heating the coating material to evaporate and vaporize it, depositing the substrate or workpiece surface, and forming a thin film or coating is called vacuum evaporation coating, abbreviated as evaporation coating or vapor deposition.


Technical parameters:
1. Background vacuum of 10-7 Torr;
2. Beam source furnace, crucible, evaporation boat, etc;
3. Quartz crystal oscillator for measuring film thickness;
4. Substrate heating temperature options: 300 ℃/500 ℃/850 ℃;
5. Can be equipped with ion beam assisted deposition;
6. Can be equipped with a rapid injection chamber;
7. Can be integrated with glove box;
8. The system can be customized according to user requirements;

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