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Low Pressure Chemical Vapor Deposition (LPVD) refers to the deposition of thin films in a low-pressure environment, which can be used for large-area and small batch sample deposition.
Technical parameters:
1. The substrate size can be customized, up to a maximum of 10 inches;
The maximum heating temperature is 1700 ℃, with options for single or multiple temperature zones;
3 can be configured with up to 6 process gases;
4. Equipped with oil pump or dry pump, optional molecular pump;
5 sample horizontal and vertical configuration modes;
6 can be mass-produced in small quantities;
Application areas:
LPCVD
annealing
spread
oxidation

Syskey Technology Co., Ltd. is a leading supplier in high quality thin film equipment for R&D and industrial production. Syskey product portfolio range from Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD in manual, Semi-Automated or Fully Automated Solutions. One of our strength is customizing and realizing thin film systems to our customers’ requirement. We believe in providing great quality product and honest service to our customers and have built enviable reputation and reliability with our worldwide customers. Following this success, Syskey continue to develop best equipment to meet our customers’ need for today and future.

By rapidly growth in technology, the staff will concentrate on industrial technology researches. We will provide clients the perfect technology services and increase customer satisfaction. In addition, we expanded our business into international and we have had achievements in China, South-East Asia, and Middle-East Countries. We expect that we will introduce our own brand to the world in the near future.

We strive to establish competitive advantages and superior products to achieve sustainable business.
1. Improve customers satisfaction
Cooperate with customers and become the best project supporter.
2. Distinctive product development
Cooperate with various industries, such as solar energy, panel board, or semiconductor, to develop leading technology.
3. Professional team-work
We focus on customer orientation. In product development and production technology, enhance business value by personnel training.

Shenzhen High Trend Tech. Co., Ltd. is committed to the sales and installation services of semiconductor microfabrication and analysis equipment, with products covering thin film preparation, physical property measurement, and surface analysis.
The main products operated are as follows (product list of Shenzhen Haichuang De Technology Co., Ltd.):
1. Magnetron sputtering, electron beam evaporation, and thermal evaporation of Taiwan SYSKEY Technology PECVD、LPCVD、ALD、RIE、ICP、RTP、 Equipment related to film technology such as glue coating machines and hot plates;
2. Components such as electron guns, ion guns, vacuum chambers, and fluorescent screens from Kimball Physics in the United States; Various vacuum components such as LEED and AES from OCI in the United States; MicroXact's vacuum, low-temperature, and magnetic field probe stations in the United States;
3. We also provide supporting components and consumables for the above-mentioned equipment, such as DC and RF power supplies, target materials, probes, photoresist, and ALD consumables.
Our products have high cost-effectiveness, excellent quality, and superior performance, and have an excellent reputation in Europe, America, and Taiwan. Many research institutes and universities in China have praised our products.
Our partners:
Taiwan Syskey Technology  , US Kimball Physics, Canada's OCI Vacuum Microengineering Inc., US McAllister Technical Services, etc.
We look forward to providing solutions to more customers with high-quality products, excellent service, and professional technology! Looking forward to working with you!