SUMEC TOUCH WORLD

SYSKEY Technology has developed a PECVD&PEALD combined coating system for users, utilizing the characteristics of PEALD and PECVD coating respectively. It is used for thin film packaging, OELD thin film packaging, solar cell packaging, and thin film lithium battery packaging in semiconductor processes. ALD technology can prepare very thin and dense films, but the time required for ALD technology to prepare dense films is relatively long, which is unacceptable in industrial production. In order to overcome the disadvantage of slow coating speed of ALD, integrating it with PECVD technology for rapid preparation of dielectric thin films can achieve a thin film structure with multiple different materials alternately stacked. Practice has proven that the thin film packaging performance of this alternating structure can achieve the same packaging effect as ALD technology, while reducing the time required for the entire packaging process.
ALD
1. Stainless steel chamber with double-layer heating design;
2. The plasma enhancement module is integrated into the upper cover of the cavity;
3. High speed ALD diaphragm valve;
4. Maximum 12 inch substrate;
5. The substrate can be heated up to 400 ℃;
6. Up to 6 precursor and 6 process gases can be provided;
7. The gas path is fully sealed with metal and can be heated to 120 ℃;
8. Can provide heating or cooling for precursor steel cylinders;
9. The process can be fully controlled automatically, and manual operation is also possible.
PECVD
1. The substrate size can be customized;
2. Low temperature process:<150 ℃/350 ℃;
3. Multi layer process gas introduction with uniform gas distribution;
4. Independent MFC control box, which can flexibly expand the process gas path;
5. The uniformity of coating on the substrate is better than ± 5%;
6. Can be integrated with glove box;

Syskey Technology Co., Ltd. is a leading supplier in high quality thin film equipment for R&D and industrial production. Syskey product portfolio range from Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD in manual, Semi-Automated or Fully Automated Solutions. One of our strength is customizing and realizing thin film systems to our customers’ requirement. We believe in providing great quality product and honest service to our customers and have built enviable reputation and reliability with our worldwide customers. Following this success, Syskey continue to develop best equipment to meet our customers’ need for today and future.

By rapidly growth in technology, the staff will concentrate on industrial technology researches. We will provide clients the perfect technology services and increase customer satisfaction. In addition, we expanded our business into international and we have had achievements in China, South-East Asia, and Middle-East Countries. We expect that we will introduce our own brand to the world in the near future.

We strive to establish competitive advantages and superior products to achieve sustainable business.
1. Improve customers satisfaction
Cooperate with customers and become the best project supporter.
2. Distinctive product development
Cooperate with various industries, such as solar energy, panel board, or semiconductor, to develop leading technology.
3. Professional team-work
We focus on customer orientation. In product development and production technology, enhance business value by personnel training.

Shenzhen High Trend Tech. Co., Ltd. is committed to the sales and installation services of semiconductor microfabrication and analysis equipment, with products covering thin film preparation, physical property measurement, and surface analysis.
The main products operated are as follows (product list of Shenzhen Haichuang De Technology Co., Ltd.):
1. Magnetron sputtering, electron beam evaporation, and thermal evaporation of Taiwan SYSKEY Technology PECVD、LPCVD、ALD、RIE、ICP、RTP、 Equipment related to film technology such as glue coating machines and hot plates;
2. Components such as electron guns, ion guns, vacuum chambers, and fluorescent screens from Kimball Physics in the United States; Various vacuum components such as LEED and AES from OCI in the United States; MicroXact's vacuum, low-temperature, and magnetic field probe stations in the United States;
3. We also provide supporting components and consumables for the above-mentioned equipment, such as DC and RF power supplies, target materials, probes, photoresist, and ALD consumables.
Our products have high cost-effectiveness, excellent quality, and superior performance, and have an excellent reputation in Europe, America, and Taiwan. Many research institutes and universities in China have praised our products.
Our partners:
Taiwan Syskey Technology  , US Kimball Physics, Canada's OCI Vacuum Microengineering Inc., US McAllister Technical Services, etc.
We look forward to providing solutions to more customers with high-quality products, excellent service, and professional technology! Looking forward to working with you!