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中文
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+86 25-84532303
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sunyuchen@sumec.com.cn
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Mini Line Micro Device Platform
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SYSKEY
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SYSKEY
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Taiwan, China
Main Products:
Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD
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Product information

To overcome the equipment space limitations in device manufacturing, Siqi Technology has developed the Mini Line, a small semiconductor manufacturing platform suitable for 2-inch wafers. It has flexible configuration, small footprint, and low operating costs. Suitable for scientific research, enterprise user teaching, and small batch device manufacturing.


Advantages:
1. Low equipment cost;
2. Low operating energy consumption;
3. Small footprint;
4. High manufacturing efficiency;
5. Flexible configuration methods;


List of Integrated Devices:
1. Multi target gun magnetron sputtering
2. Electron beam evaporation
3. Thermal evaporation
4. PECVD
5. RIE
6. PEALD
7. ALE
8. Annealing
9. Plasma treatment

All products in the store
Magnetron sputtering (co sputtering)All products in the store
Mini Line Micro Device PlatformAll products in the store
Lift off electron beam evaporation coating machineAll products in the store
Manual coating systemAll products in the store
Thermal evaporation coating machineAll products in the store
CIGS solar cell coatingAll products in the store