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Mini Line Micro Device Platform
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Price:
price negotiable
Brand Name:
SYSKEYCountry Region:
Taiwan, China
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SYSKEY 
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Country: Taiwan, China
Main Products: Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD
View more
Price:
price negotiable
Brand Name:
SYSKEYCountry Region:
Taiwan, China
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SYSKEY 
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Taiwan, China
Main Products:
Sputter, E-Beam, Thermal Evaporator, ALD, PEALD, RIE, PECVD, and LPCVD
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Product information
To overcome the equipment space limitations in device manufacturing, Siqi Technology has developed the Mini Line, a small semiconductor manufacturing platform suitable for 2-inch wafers. It has flexible configuration, small footprint, and low operating costs. Suitable for scientific research, enterprise user teaching, and small batch device manufacturing.
Advantages:
1. Low equipment cost;
2. Low operating energy consumption;
3. Small footprint;
4. High manufacturing efficiency;
5. Flexible configuration methods;
List of Integrated Devices:
1. Multi target gun magnetron sputtering
2. Electron beam evaporation
3. Thermal evaporation
4. PECVD
5. RIE
6. PEALD
7. ALE
8. Annealing
9. Plasma treatment
All products in the store
Magnetron sputtering (co sputtering)
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Mini Line Micro Device Platform
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Lift off electron beam evaporation coating machine
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Manual coating system
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Thermal evaporation coating machine
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CIGS solar cell coating
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