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Thermal evaporation source for molecular beam epitaxy system components
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China
Main Products:
Molecular beam epitaxy system (MBE), pulsed laser deposition system (PLD), reflective high energy electron diffractometer (RHEED), evaporation source, electron gun, ion gun, etc
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Product information

Thermal evaporation sources are designed for evaporating different elements and compounds, such as III/V MBE systems. Typical evaporation materials include Ga, In, Al, Si, Be, Cu, Au, etc. We need to use different source furnaces for different materials.

Medium temperature beam source furnace WEZ

-Temperature range: 700 ℃~1400 ℃

-Crucible capacity: 2-200 cc

-Standard filament, cold lip, hot lip, dual filament of various types

 

Low temperature beam source furnace NTEZ

-Temperature range: 80 ℃~1000 ℃

-Crucible capacity: 2-200 cc

-Standard filament, cold lip, hot lip, dual filament of various types

 

High temperature beam source furnace HTEZ/HTS

-Temperature range:~2000 ℃

-Crucible capacity: 1.5~35 cc

-Self supporting W wire heating, pyrolytic graphite heating wire

 

Large capacity beam source furnace PEZ

-Temperature range: 200 ℃~1400 ℃

-Crucible capacity: 40-1700 cc

-Standard filament, cold lip, hot lip, dual filament of various types

Organic matter beam source furnace OME

-Temperature range: 15 ℃~300 ℃

-Crucible capacity: 2-35 cc

-Temperature stability:<± 0.02 ℃

 

Oxygen resistant beam source furnace OREZ

-Temperature range: 200 ℃~1200 ℃

 

-Crucible capacity: 10~125 cc

-Standard filament, cold lip, hot lip, dual filament of various types

-Heating wires and shielding components are made of oxygen resistant materials

 

Phosphorus doped source DECO

-High purity P2 is produced through GaP cracking, which is easy to operate and safe

-Crucible capacity: 10~420 cc

-Working temperature: 900 ℃~1200 ℃

Silicon Shenghua Source SUSI

 

-Working temperature:~1400 ℃

-Ultra pure silicon heating wire and silicon shielding component, with a beam control accuracy of up to 0.1A/s

-Used for growing ultra-thin Si thin films, high-purity Si doping, III-V group doping, GaAs doping

 

 

Carbon Upgrade Huayuan SUKO

-Working temperature:~2300 ℃

-High purity PG heating wire

-Used for high-purity C doping, III-V group doping, and graphene research

Thermal cracking source TCC

 

-Temperature range:~1300 ℃

-Crucible capacity: 35, 130 cc

-Three temperature zone design

-Used for growing Te, Sb, Se, As, Mg

Click to view more 'Product Categories'

 

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