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Desktop modular vacuum coating system
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China
Main Products:
Molecular beam epitaxy system (MBE), pulsed laser deposition system (PLD), reflective high energy electron diffractometer (RHEED), evaporation source, electron gun, ion gun, etc
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Product information

HEX desktop thin film sputtering deposition system

Korvus Technology Ltd. is committed to developing and manufacturing modular small film preparation coatings, particularly suitable for scientific research training and laboratory basic coating applications, such as metal electrode preparation, new film development, etc;

Main features:

-Modular design, can be replaced according to user application needs, and the vacuum chamber can also be modularized and combined

-Compatible with various deposition techniques such as magnetron sputtering, electron beam evaporation, and thermal evaporation

-Suitable for scientific research training and new thin film deposition

-Can be integrated with glove box

-Small footprint

Main configuration and performance indicators:

1. A chamber formed by six independent panel surfaces that can be quickly disassembled and replaced (blind plate, visual window, sputtering source window, QCM window)

2. The system saves laboratory space, occupying approximately 1 square meter, with a cavity size of 65 cm * 60 cm * 70 cm and a weight of approximately 50 kg

3. Rapid (reaching 5 * 10-6 Torr within 20 minutes)

4. Sample table size of 4 inches and below (optional with 2-20 rpm rotation, 500 ℃ heating, water cooling, DC bias)

5. Four types of sputtering sources: magnetron sputtering; Electron beam evaporation source, thermal evaporation, organic matter evaporation source

6. It can integrate film thickness measurement function, glove box system, and various customized functions

7. Automatic operation software control (optional)

8. Can be equipped with a rapid injection chamber (optional)

9. In situ monitoring options: thermal imaging, in-situ plasma spectroscopy, quartz crystal oscillator

 


Application areas:

Chemical catalysis

Preparation of electrode film

Preparation of Metal Semiconductor Thin Films

Preparation of magnetic thin films

Micro nano devices

Optical components

If you have any equipment requirements, please feel free to contact us at any time.


 

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