








Product information
HEX desktop thin film sputtering deposition system
Korvus Technology Ltd. is committed to developing and manufacturing modular small film preparation coatings, particularly suitable for scientific research training and laboratory basic coating applications, such as metal electrode preparation, new film development, etc;
Main features:
-Modular design, can be replaced according to user application needs, and the vacuum chamber can also be modularized and combined
-Compatible with various deposition techniques such as magnetron sputtering, electron beam evaporation, and thermal evaporation
-Suitable for scientific research training and new thin film deposition
-Can be integrated with glove box
-Small footprint
Main configuration and performance indicators:
1. A chamber formed by six independent panel surfaces that can be quickly disassembled and replaced (blind plate, visual window, sputtering source window, QCM window)
2. The system saves laboratory space, occupying approximately 1 square meter, with a cavity size of 65 cm * 60 cm * 70 cm and a weight of approximately 50 kg
3. Rapid (reaching 5 * 10-6 Torr within 20 minutes)
4. Sample table size of 4 inches and below (optional with 2-20 rpm rotation, 500 ℃ heating, water cooling, DC bias)
5. Four types of sputtering sources: magnetron sputtering; Electron beam evaporation source, thermal evaporation, organic matter evaporation source
6. It can integrate film thickness measurement function, glove box system, and various customized functions
7. Automatic operation software control (optional)
8. Can be equipped with a rapid injection chamber (optional)
9. In situ monitoring options: thermal imaging, in-situ plasma spectroscopy, quartz crystal oscillator
Application areas:
Chemical catalysis
Preparation of electrode film
Preparation of Metal Semiconductor Thin Films
Preparation of magnetic thin films
Micro nano devices
Optical components
If you have any equipment requirements, please feel free to contact us at any time.













![[Second-hand] laser](https://cdn.sumecdtx.com/equipment/20230818/928f9346aceb42e3b60670c380399f59.jpg)



