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Molecular Beam Epitaxy System (MBE) OCTOPLUS 500 EBV MBE system was developed to grow high quality Si/SiGe material on a 4 inch Si substrate. It can also be upgraded to a 6 inch sample. The cavity can also be loaded with 2 electron beam evaporation and 8 beam sources or loaded with gas ejection, or surface treatment.

Chamber size: 550 mm ID, liquid nitrogen cold screen (compatible with water cooling)

Background vacuum: < 5 × 10-11 mbar

Sample size: up to 4 inches, downward compatible with small size samples

Heater: SiC, W and other types of optional, the highest temperature up to 1500 ℃

Source furnace flange: 8 × DN63CF, 2 × DN250CF

Applications: SiGe, metals, oxides, 2D materials, topological superconducting materials, etc

MBE systems with SiGe and other materials equipped with beam source and electron beam evaporation source

● Ideal for Si/SiGe epitaxial growth or metal deposition

● The substrate can be 3,4 or 6 inches

● 2 large capacity electron gun source holes

● 8 beam source or gas source holes

● In situ characterization ability

● Easy to use and maintain

● Clean room assembly and testing

● Strong support team of MBE PhD experts

The electron beam produced by the electron gun can be detected by a four-stage mass spectrometer. Pyrolytic graphite heating or tungsten, tantalum heating wire is selected for the sample table. The OCTOPLUS 500 EBV MBE system is well recognized for the development and production of metal, magnetic, oxide, topological insulation and Si/SiGe heterogeneous structural materials growth applications.

The standard OCTOPLUS 500 EBV MBE has 10 radially distributed source holes, and we recommend 8 source holes for beam sources, sublimation sources, or related components. Two DN250CF large source holes are used for the electron beam evaporation gun, which can also be a porous electron gun -EBVM. The rapid vacuum sampling chamber is equipped with a horizontal magnetic rod transmission system, which can easily transfer samples without destroying the vacuum of the MBE chamber. RHEED systems can be equipped to monitor film growth in situ.

For more information, click on the "Product categories ‍" ‍

Direct to specific products molecular beam epitaxy system (MBE), pulsed laser deposition system (PLD), reflective High energy electron diffractometer (RHEED), evaporation source, ion source ‍, electron gun

Beijing Eberl Instrument Trading Co., Ltd. is run by Chinese experts for UHV and thin film depositon. The team members have related scientific background and rich experience. The purpose and task of us is to provide professional and fast service to our customers in China and strictly follow the legitimate roles of law. We give advice in product selection and help our customers to find the most suitable solutions.

Our Corporate Philosophy is:

● Fast and professional customer response

● Fair and transparent price policy

● Ensure high product quality

● Fast and high efficient local service team

Our Partners:
 

Dr. Eberl MBE-Komponenten GmbH manufactures and sells thin film deposition equipment for MBE, surface science and other UHV-applications. The product range comprises evaporation sources, effusion cells, electron beam evaporators, sublimation sources, gas sources and various customized equipment. In more than 25 years of successful business Dr. Eberl MBE-Komponenten GmbH has delivered more than 2000 effusion cells and evaporation sources of various kinds as well as systems and services to more than 500 customers worldwide.

Dr. Karl Eberl founded MBE-Komponenten GmbH in November 1990 as a spin-off from the Technische Universität München, Walter-Schottky-Institute, Garching. First products were Silicon Sublimation Sources, Carbon Sublimation Sources and High Temperature Sources for Molecular Beam Epitaxy. The chief executive officer Dr. Karl Eberl also supervised the MBE division in the Max-Planck-Institute in Stuttgart and has over 15 years of active research experience with more than 300 publications in the field of SiGe and III-V-compound MBE.

Twente Solid State Technology BV（TSST）was founded in 1998 as a spin-off company from the University of Twente, and offers high quality thin film solutions. As a result TSST products can now be found around the world.

The company is specialised in design and production of customised thin film deposition equipment, specifically Pulsed Laser Deposition equipment for advanced studies. An example is the use of Reflection High Energy Electron Diffraction (RHEED) under high-pressure conditions, which gives real-time information about the surface morphology during depositions.

STAIB Instruments is one of the world's leading companies for high performance surface analysis instruments.

STAIB has provided surface analysis systems for over 20 years, with a record of excellence and quality. All system are hand-built, and can be tailored to suit many individual customer's needs.

Ferrovac GmbH was founded in 1996 by Urs Maier and Andreas Vaterlaus as a spin-off company of the Swiss Federal Institute of Technology (ETHZ) in Zurich, Switzerland.

Our main fields of activitiy are the design and production of components for ultra high vacuum technology as well as the development of scientific instruments for surface science and nanotechnology.

Ferrovac experts have profound knowledge of ultra high vacuum technology, experimental physics and scanning probe microscopy.

Korvus Technology Ltd. sells and manufactures the HEX Series of bench top thin film deposition systems. The company has over 20 years of experience in the thin film technology market, designing, manufacturing and installing HV and UHV deposition systems. The HEX platform offers an un-matched level of user control and customization, designed to incorporate the latest thin film technologies and performance into a bench top PVD system.

CryoVac GmbH & Co KG or Cryovac low temperature technologies inc. respectively, offers a broad range of cryogenic systems and equipment customized to meet your research needs.

We adapt open and closed cycle systems for every application, like

- optical spectroscopy

- electrical measurements

- sample in vacuum or gas atmosphere

- high magnetic field applications

- internal sample positioning systems

- external sample manipulators

- various combinations of different applications, e.g. electro-optical or magneto-optical measurements

Nextnano GmbH's Software for the simulation of electronic and optoelectronic semiconductor nanodevices, we develop powerful tools for the simulation of nanostructures.

Applications include nanotransistors, LEDs, laser diodes, quantum dots, nanowires, quantum cascade lasers, HEMTs, infrared detectors and solar cells.

Due to the continuing scaling of semiconductor electronics, quantum physical effects are gaining importance and fundamentally challenge industry with respect to simulation and design. Our unique selling proposition is an advanced physical method for the calculation of the quantum mechanical properties of an arbitrary combination of geometries and materials.

CRYSTAL Stands for Quality and Reliability

With years of experience in the processing of crystalline materials, glasses and ceramics CRYSTAL is the choice for research and development as well as industrial requirements. We offer high-tech products and comprehensive services for various fields of application from thin film layer technology, sensor technology and equipment manufacturing to laser technology.

We see ourselves as your partner in the implementation of ideas and projects, from single pieces to series production.

Modern production technologies and dedicated employees at our headquarters in Berlin guarantee a high quality standard and flexible order processing.

Focus GmbH focuses on the fine welding technology, supplies customized high precision welder(MEBW60) and high precision Laser in Vacuum   welder(LaVa),   more than 30 years' welding experience.
 

Research Instruments GmbH (RI) is a majority owned subsidiary of Bruker Energy & Supercon Technologies Inc., a subsidiary of Bruker Corporation and was established in 2009. RI has long experience in building and working with Advanced Technologies (UH Vacuum, Ultra-clean, Nano-positioning in Vacuum, EUV sources, optics, and integration Discharges, Analytics, Spectroscopy).

RI's competence in soft-x-ray, XUV & EUV lab solutions is on plasma based radiation sources integrated in systems with ultra-high and ultra-clean vacuum and optical and fine mechanical components.

Beijing Eber Instrument Trading Co., Ltd.is a professional supplier of vacuum film preparation solutions. Our team members have a professional knowledge background and rich industry experience. Our goal and purpose are to provide long-term stable and localized fast services to Chinese customers and strictly comply with local laws. We not only sell high-quality products, but also utilize our professional knowledge and rich experience to provide customers with product consulting and the most suitable solutions.

Our strengths：

A professional pre-sales and after-sales technical service team Fast response time Years of research experience and sales experience in research equipment
 

Our partners：

Dr. Eberl MBE-Komponenten GmbH、Twente Solid State Technology BV（TSST）、

STAIB Instruments GmbH、Ferrovac GmbH、Korvus Technology Ltd. 、CryoVac GmbH & Co. KG 、NextNano GmbH、CRYSTAL、Focus GmbH、Research Instruments 。

Beijing Eber Instrument Trading Co., Ltd.is a professional supplier of vacuum film preparation solutions. Our team members have a professional knowledge background and rich industry experience. Our goal and purpose are to provide long-term stable and localized fast services to Chinese customers and strictly comply with local laws. We not only sell high-quality products, but also utilize our professional knowledge and rich experience to provide customers with product consulting and the most suitable solutions.

Our partners：
 

Dr. Eberl MBE-Komponenten GmbH、Twente Solid State Technology BV（TSST）、

STAIB Instruments GmbH、Ferrovac GmbH、Korvus Technology Ltd. 、CryoVac GmbH & Co. KG 、NextNano GmbH、CRYSTAL、Focus GmbH、Research Instruments 。