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SiC Wafer Defect Inspection System
Price：
price negotiable
Brand Name：
AK Optics Country Region：
ChinaModel No：
E3500
Post Requirements
AK Optics 
Country： China
Main Products：
View more
Price：
price negotiable
Brand Name：
AK Optics Country Region：
ChinaModel No：
E3500
Post RequirementsAK Optics 
China
Main Products：
Product information
The E3500 is a defect inspection equipment specifically designed for SiC wafers. It can inspect surface and fluorescent defects in SiC substrates and epitaxial wafers. This equipment can identify and differentiate between defects such as triangle, carrot, downfall, micropipe, SF (stacking fault), and BPD (basal plane dislocation). It supports inspection of 4", 6", and 8" wafers, offering high throughput and high inspection accuracy.
Wafer Size
Size: 4", 6", 8" compatible;
2 cassettes; other sizes upon requests
Thickness:350um~1500um(Other thicknesses need to be tested)
Defect Inspection Capability
SiC Substrate：Particle、Scratch、pit、bump、stain、Micro Pipe、KOH Etch Mapping、SF
SiC Epi：Particle、Scratch、pit、bump、Carrot&Surface Triangle、Downfall、KOH Etch Mapping、SF，BPD
*It can identify pits and bumps as small as 0.18µm.
All products in the store
F2000 Particle counter
H2000 integrated circuit graphic wafer front defects
Wafer Surface Profile Inspection and Sorting System
SiC Wafer Defect Inspection System
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