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Global Trading Service Platform for Machinery

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中文
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+86 25-84532303
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sunyuchen@sumec.com.cn
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VTM Robot
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Honghu Semiconductor
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Honghu Semiconductor
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China
Main Products:
Equipment Front-End Module (EFEM), wafer sorter, Vacuum Transfer Module (VTM),
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Product information

R (radial) axis:

Measuring range: 1010mm

Repeatability: ±0.05mm

T (rotating) axis:

Range: Infinite spins

Repeat positioning accuracy: ±0.003°

Z (vertical) axis:

50mm、100mm、150mm

Repeat positioning accuracy: ±0.05mm

Low leakage rate: <1*10^(-9) std.cc/sec-He

High vacuum: <5*10^(-8)Torr

Cleanliness level: ISO class 1

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