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Global Trading Service Platform for Machinery

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中文
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+86 25-84532303
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sunyuchen@sumec.com.cn
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ATM Robot
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Honghu Semiconductor
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Honghu Semiconductor
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China
Main Products:
Equipment Front-End Module (EFEM), wafer sorter, Vacuum Transfer Module (VTM),
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Product information

• Single-arm/double-arm structure, can be flipped with turnover, according to the needs of the choice

• The imputation algorithm supports VIA (Inflection Point) and supports multiple FOUPs

• Full axis AC servo motor, 23bits absolute encoder

• S-curve acceleration and deceleration motion control technology to achieve high-speed, high-precision handling

•Universal wafer fixing method: vacuum adsorption type, edge clamping type

• Cleanliness Class: ISO Class 1

• Finger material: carbon fiber, aluminum alloy, high-purity ceramics and other options

•According to the characteristics of the wafer material, the design provides the optimal blessing scheme

All products in the store
Sorter/EFEMAll products in the store
VTMAll products in the store
SMIF SeriesAll products in the store
ATM RobotAll products in the store
VTM RobotAll products in the store