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中文
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+86 25-84532303
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sunyuchen@sumec.com.cn
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VTM
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Honghu Semiconductor
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Honghu Semiconductor
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China
Main Products:
Equipment Front-End Module (EFEM), wafer sorter, Vacuum Transfer Module (VTM),
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Product information

Advantages:

  • High vacuum    5.0x10-8 Torr (depending on vacuum system);
  • Low leakage rate     <1.0x10-8 cc/sec He;
  • High security     Rigorous and complete hardware interlocking design of slot valves, process modules, robots, etc.;
  • Support 100/150/200/300mm wafer transfer;
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