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SUMEC TOUCH WORLD

Global Trading Service Platform for Machinery

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中文
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+86 25-84532303
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sunyuchen@sumec.com.cn
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SMIF Series
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Honghu Semiconductor
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Honghu Semiconductor
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China
Main Products:
Equipment Front-End Module (EFEM), wafer sorter, Vacuum Transfer Module (VTM),
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Product information

Advantages:

  • Surports 150/200mm multi-specification wafer compatible processing capacity;
  • Accurate and reliable motion control, performance can be benchmarked against the products of internationally renowned manufacturers;
  • Transmission cycle< 90s; Repositioning accuracy +_0.127mm; Orientation error +_0.2mm;
  • Cleanliness level:class1;
     
All products in the store
Sorter/EFEMAll products in the store
VTMAll products in the store
SMIF SeriesAll products in the store
ATM RobotAll products in the store
VTM RobotAll products in the store