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SUMEC TOUCH WORLD

Global Trading Service Platform for Machinery

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中文
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+86 25-84532303
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sunyuchen@sumec.com.cn
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Sorter/EFEM
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Honghu Semiconductor
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Honghu Semiconductor
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China
Main Products:
Equipment Front-End Module (EFEM), wafer sorter, Vacuum Transfer Module (VTM),
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Product information

EFEM:

  • Provide compatible 100/150/200/300mm multi-specification wafer transfer solutions;
  • Provide customized solutions: including racks, bearing tables, clean robots, wafer clamping methods, purification for the environment, etc.;
  • Provide special process transmission solutions, including high temperature resistance, corrosion resistance, etc.;
  • Support a variety of communication protocols;
  • Support customized communication interface;
  • Ultra-cleanliness: class 1;
  • High stability

Sorter:

  • Provide compatible 100/150/200/300mm multi-specification wafer sorting solutions;
  • Provide customized wafer sorting and transfer solutions: including wafer readers, inverted structures and chemical filters, layout solutions (2-10 load ports), etc.
  • High speed      320 pieces/hour, including wafer barcode reading; 1,100 wafers/hour, without wafer barcode reading;
  • High Stability       MCBF 15,000,000 cycles for key components;
  • Ultra-clean cleanliness level     ISO class1, PWP index: 0.05@0.037um;
All products in the store
Sorter/EFEMAll products in the store
VTMAll products in the store
SMIF SeriesAll products in the store
ATM RobotAll products in the store
VTM RobotAll products in the store