SUMEC TOUCH WORLD

The patterned wafer defect inspection equipment has bright field, dark field, AI, and combined with spatial filtering technology, which can inspect defects such as particles, scratches, pits, and protrusions on patterned Si/GaN/SiC wafers. The main application of this tool is to inspect various front-end process nodes in HVM IC Fab, in order to improve the yield of chip production.

Equipment Description Features

Wafer handling EFEM: 6 "/8" SMIF or 12 "FOUP

Suitable for Si/GaN/SiC wafers

Wafer warpage not exceeding 200um

Wafer thickness 350um~1.5mm (bottom clamp)

Bright field and oblique dark field

Patterned wafer particle inspection sensitivity 100nm

Process Node 90-130nm

Options Available

/OCR: OCR, recognition rate ≥ 99% (compliant with SEMI font standards, except for unclear engraving)

/IV: Offline image viewing software that can be used for offline analysis

/SG: SECS-GEM, supports SEMI automation standard SECS/GEM communication interface, complies with SEMI E5- (SECS-II), SEMI E30- (GEM), SEMI E37- (HSMS) communication standards, and retains other communication protocol interfaces

/PSL: PSL Si standard wafer

Established in 2017, headquartered in Beijing, AK Optics has research and development and production bases in Beijing, Hangzhou, and Nanchang. The company was founded by senior overseas experts and is an enterprise that integrates research and development, production, sales, and service.
Focused on providing optical measurement and inspection equipment and solutions for the compound semiconductor, optoelectronic, and integrated circuit industries. Its products cover multiple aspects of production process measurement and testing in related industries, including substrate thickness and morphology measurement, substrate particle inspection, epitaxial wafer inspection, chip appearance inspection, MOCVD online monitoring, etc
Adhering to independent originality, we have accumulated and made breakthroughs in key technologies such as optical system design, optical imaging technology, and AI algorithms. We have multiple leading technologies independently developed and possess industry recognized research and development capabilities.
The company's series of wafer defect inspection equipment has been mass-produced in the fields of LED chips, compound semiconductors, and specialty process integrated circuits, and has gained market recognition.
Obtained recognition as a national high-tech enterprise, Zhongguancun high-tech enterprise, specialized and innovative small and medium-sized enterprise, and specialized and innovative "little giant" enterprise

AK Optics is based on independent originality, continuously increasing research and development investment, adhering to a pursuit of excellence, and dedicating itself to building international level wafer inspection equipment. Contribute to the localization and development of semiconductor technology. AK Optics is committed to becoming a world leading optical equipment research and manufacturing enterprise.

Having multiple independently developed leading technologies: high-resolution dual telecentric, large field of view color lens, optical system design technology, deep learning algorithm technology, defect analysis and monitoring system for various processes and equipment

The product line includes:

MOCVD in-situ Monitoring System: This product is used for real-time monitoring of wafer temperature, reflectivity, and curvature during the process, providing reliable temperature signals for precise temperature control. It is compatible with MOCVD machines of various rotational speeds. The product range includes temperature, reflectivity, and curvature online monitoring (viperRTC), surface temperature measurement (viper405), temperature calibration unit, and thermal field scanning system (Scanpyro), among others.

Inspection Equipment for LED Lighting and Display: This includes wafer morphology inspection, wafer substrate defect inspection, PSS inspection equipment, GaN and GaAs epitaxial wafer defect inspection equipment, and AOI equipment for chip appearance defect inspection. These are mainstream optical measurement and inspection devices for LED manufacturers in China.

Compound Semiconductor Substrate and Epitaxy Inspection Equipment: Mainly includes inspection equipment for second-generation semiconductors like GaAs and InP substrates and epitaxial layers, third-generation semiconductors such as GaN and SiC substrates and epitaxial layers, LT&LN inspection equipment, glass and patterned wafer inspection equipment. It features a self-developed optical system recognized by the industry, benchmarked against internationally renowned companies, with performance acknowledged within the sector.

Integrated Circuit Inspection Equipment: Focuses primarily on defect inspection of non-patterned substrates, chip inspection, CIS chips, and patterned wafer inspection.

The lead time for various inspection equipment is 4 to 6 months.