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DLC In-line System
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China
Main Products:
Coating equipment + supporting automation equipment
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Product information

use

Suitable for the development and mass production of optical DLC films (diamond-like carbon films). Diamond-Like Carbon is a type of amorphous carbon thin film material with diamond-like characteristics. Its carbon atoms are hybridized through sp2 bonds (graphite structure) and sp3 bonds (diamond structure) to form a disorderly network structure. It has excellent properties such as high hardness, low friction coefficient, chemical stability, high light transmission, and good biocompatibility. It is widely used in infrared windows, anti-reflective coatings, laser components, biomedicine, automotive industry, * and other fields.

 

characteristics

The equipment is equipped with a cold trap to quickly increase the continuous line pumping rate, and is suitable for depositing diamond-like films on metals, glass, plastic parts, etc.

Equipped with two pairs of mid-frequency magnetron planar targets, it effectively improves film quality and deposition efficiency.& nbsp;

The equipment is equipped with an ICP ion source to ensure the activation and cleanliness of the substrate before coating and improve the adhesion of the film to the substrate.& nbsp;

Provide more than 4 gas sources to control the doping process of DLC films, reduce the internal stress of the films, and adjust the optical parameters of DLC.

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