


Post Requirements

Post Requirements
Product information
The main pump of Kiron series dry vacuum pumps adopts a multi-stage Roots structure, with low power, high pumping speed, strong powder discharge ability, and can transport flammable, explosive, easily condensed and other process gases. The pumping speed is stable. It can be used for large exhaust capacity. High process reliability and low operation and maintenance costs. Suitable for manufacturing in clean, medium and harsh processes such as PECVD, MOCVDSIC-CVD, and Etch in photovoltaic, semiconductor and other industries
Product features:
1: Adopt permanent magnet synchronous motor, have lower energy consumption: advanced rotor structure can enhance the pump's dust discharge ability
2: Insensitive to dust and water vapor contained in the gas being pumped
3: Compact structure, small overall size, high system integration
4: Complete protection functions and strong adaptability
5: Small vibration and low noise during operation
6: The advanced labyrinth sealing system combined with nitrogen purging can effectively ensure that there is no oil in the pump chamber and improve the vacuum cleanliness of the process chamber.
7: Remote control and monitoring functions can be realized through I/O interface and RS485 interface (Moudbus protocol)





















Search

