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Kulon D series vacuum butterfly valve
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Kaiwu Intelligent
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Kaiwu Intelligent
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China
Main Products:
Vacuum pump, butterfly valve
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Product information

Kulon D-vacuum butterfly valve is mainly composed of a valve body and a driving part. It can be used in CVD, ALD and other processes in the photovoltaic/semiconductor industry.

In the Kulon-M series, the valve plate is used as a throttling element. The flow rate is adjusted by adjusting the opening of the valve plate. There is a gap in the closed state of the valve plate, which can meet the requirements of maintaining good operating performance in harsh downstream control systems.

In the Kulon-C series, the valve plate is equipped with sealing rings, which can not only achieve fine pressure control but also be used as pipeline isolation.

  1. Using stepper motor, fast and precise control can be achieved
  2. Excellent pressure control performance, good process controllability
  3. Reliable operation under harsh process conditions
  4. Long uptime/unlimited performance
  5. low operation cost
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