SUMEC TOUCH WORLD

MicroSense, LLC, formerly known as ADE Technologies, consists of four main businesses-wafer geometry measurement systems, precision capacitive sensors, vibrating sample magnetometers and the * advanced magnetic measurement Magneto-Optical Kerr Effect (MOKE) tool. MicroSense serves many industries such as semiconductor manufacturing, data storage, machine tools, solar energy, automobiles and high-brightness LEDs. MicroSense provides value and security to customers through its rich business experience, financial strength, global support and technological leadership. MicroSense was acquired by KLA Corporation on February 22, 2019.

Pioneering high-resolution measurement and capacitive sensors
Our capacitive sensor business is developed by Robert C. Abbe was founded in 1967 and was originally part of ADE. ADE is known for its foresight and novel high-resolution non-contact measurement methods for demanding size measurement applications. Over time, ADE has grown into the world's leading supplier of bare semiconductor wafer measurement tools. High-resolution capacitive sensors (also known as "cap gage") used for position and displacement measurements became synonymous with "ADE" and our trademark name "MicroSense".

MicroSense provides capacitive sensors and OEM metrology modules. Capacitive sensing technology based on ** provides very accurate, high-bandwidth measurements on precision products such as solar wafers, sapphire wafers, hard disk drive motors, air bearing spindles, precision X-Y classes, optical discs, automotive parts and machine tools. Our capacitive displacement sensors provide the industry's highest resolution, less than 0.05 nm, excellent stability and al* unlimited service life.